Applications of high-resolution MFM system with low-moment probe in a vacuum

Magnetic force microscopy (MFM) is very useful for observing magnetic domain structures. However, due to stray fields from an MFM probe, observations of small magnetic domain structures are limited. The authors have developed a high-resolution MFM system that utilizes a low-moment probe and a quality (Q)-controlled prove driver, which allows high-quality measurement in a vacuum without disturbing domain structures. Using this system, a resolution finer than 20 nm was achieved. In this paper, the advantages of this MFM are demonstrated using a Permalloy honeycomb nanonetwork and a Permalloy semicircular loop.