Fabrication of Mo/Cu multilayer and bilayer transition edge sensors

We are developing cryogenic high-resolution X-ray, Gamma-ray and neutron spectrometers based on superconducting Mo/Cu transition edge sensors. Here we discuss the sensor design for different applications, present the photolithographic fabrication techniques, and outline future detector development t...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2005-06, Vol.15 (2), p.526-529
Hauptverfasser:	Ali, Z.A., Drury, O.B., Cunningham, M.F., Chesser, J.M., Barbee, T.W., Friedrich, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Copper Device fabrication Electronics Energy resolution Exact sciences and technology Fabrication Gamma ray detectors gamma-ray spectrometers Microelectronic fabrication (materials and surfaces technology) Mo/Cu multilayers Multilayers Neutron spectrometers Neutrons Nonhomogeneous media Photolithography Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors Spectrometers Spectroscopy Superconducting materials Superconducting photodetectors superconducting transition edge sensors Superconductivity Temperature sensors Thermal conductivity x-ray spectrometers X-rays
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Beschreibung
Zusammenfassung:	We are developing cryogenic high-resolution X-ray, Gamma-ray and neutron spectrometers based on superconducting Mo/Cu transition edge sensors. Here we discuss the sensor design for different applications, present the photolithographic fabrication techniques, and outline future detector development to increase the spectrometer sensitivity.
ISSN:	1051-8223 1558-2515
DOI:	10.1109/TASC.2005.849897