Properties of PZT thick films made on LTCC

Purpose - To find properties of screen printed PZT (PbZr0.53Ti0.47O3 with 6 per cent of PbO and 2 per cent of Pb5Ge3O11) thick films layers on LTCC substrate.Design methodology approach - The influence of PZT firing time and electrode materials on electrical characteristics and microstructure were examined. A scanning electron microscope (SEM) equipped with an energy-dispersive X-ray (EDS) analyser was used for the microstructural and compositional analysis.Findings - Microstructural and compositional analyses have shown the diffusion of SiO2 from LTCC into PZT layers and the diffusion of PbO in the opposite direction. SiO2 presumably forms low permitivity lead based silicates in PZT layer. The new phase deteriorates the piezoelectric properties. The amount of diffused materials was dependent upon the electrode material and increased with increasing firing time. Better properties, i.e. higher remanent polarisation and dielectric constant were achieved for samples with PdAg electrodes and shorter firing time.Originality value - New information on electrical and microstructural properties of thick film PZT made on LTCC substrate.