Scanning grating microinterferometer for MEMS metrology: Special issue on micro/meso-scale manufacturing

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Veröffentlicht in:	Journal of manufacturing science and engineering 2004, Vol.126 (4), p.807-812
Hauptverfasser:	KIM, Byungki, SCHMITTDIEL, Michael C, DEGERTEKIN, F. LEVENT, KURFESS, Thomas R
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Exact sciences and technology Fundamental areas of phenomenology (including applications) Industrial metrology. Testing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Micromechanical devices and systems Physics Precision engineering, watch making Solid mechanics Structural and continuum mechanics Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
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ISSN:	1087-1357 1528-8935