Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications

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Hauptverfasser:	ARASHIRO, E. Y, CARRENO, M. N. P
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Micro- and nanoelectromechanical devices (mems/nems) Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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container_start_page	107
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creator	ARASHIRO, E. Y CARRENO, M. N. P
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format	Conference Proceeding
fullrecord	<record><control><sourceid>pascalfrancis</sourceid><recordid>TN_cdi_pascalfrancis_primary_16546825</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>16546825</sourcerecordid><originalsourceid>FETCH-pascalfrancis_primary_165468253</originalsourceid><addsrcrecordid>eNqNjbFuwjAURS1opUZt_uEtHSPFSWyTsaqKWJAY2NGLsamr2A5-Ycjf46J-QKcz3HN0V6xohJIVF6pfs7JXGy6kVKrjkj-xos6oZKu6F1YS_dR13bRc8L4rWDjEcfEmOQ06pnS74GzO4I0fEgZDEC0c9vsPsDhk5zEOC3inU6w00uzCBWajv4O73gzYmMBH4wkwnCFOc05GwGn8TV0M9MaeLY5kyj--svft1_FzV01IWbX5VDs6Tcl5TMuJS9HJTSPa_3p3N61RMw</addsrcrecordid><sourcetype>Index Database</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications</title><source>IOP Publishing Journals</source><creator>ARASHIRO, E. Y ; CARRENO, M. N. P</creator><creatorcontrib>ARASHIRO, E. Y ; CARRENO, M. N. P</creatorcontrib><identifier>ISSN: 0161-6374</identifier><identifier>ISBN: 9781566774161</identifier><identifier>ISBN: 1566774160</identifier><identifier>EISSN: 2576-1579</identifier><language>eng</language><publisher>Pennington NJ: Electrochemical Society</publisher><subject>Applied sciences ; Electronics ; Exact sciences and technology ; Micro- and nanoelectromechanical devices (mems/nems) ; Microelectronic fabrication (materials and surfaces technology) ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><ispartof>Proceedings - Electrochemical Society, 2004, p.107-112</ispartof><rights>2005 INIST-CNRS</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>309,310,780,784,789,790,4047,4048</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=16546825$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>ARASHIRO, E. Y</creatorcontrib><creatorcontrib>CARRENO, M. N. P</creatorcontrib><title>Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications</title><title>Proceedings - Electrochemical Society</title><subject>Applied sciences</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Micro- and nanoelectromechanical devices (mems/nems)</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><issn>0161-6374</issn><issn>2576-1579</issn><isbn>9781566774161</isbn><isbn>1566774160</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2004</creationdate><recordtype>conference_proceeding</recordtype><recordid>eNqNjbFuwjAURS1opUZt_uEtHSPFSWyTsaqKWJAY2NGLsamr2A5-Ycjf46J-QKcz3HN0V6xohJIVF6pfs7JXGy6kVKrjkj-xos6oZKu6F1YS_dR13bRc8L4rWDjEcfEmOQ06pnS74GzO4I0fEgZDEC0c9vsPsDhk5zEOC3inU6w00uzCBWajv4O73gzYmMBH4wkwnCFOc05GwGn8TV0M9MaeLY5kyj--svft1_FzV01IWbX5VDs6Tcl5TMuJS9HJTSPa_3p3N61RMw</recordid><startdate>2004</startdate><enddate>2004</enddate><creator>ARASHIRO, E. Y</creator><creator>CARRENO, M. N. P</creator><general>Electrochemical Society</general><scope>IQODW</scope></search><sort><creationdate>2004</creationdate><title>Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications</title><author>ARASHIRO, E. Y ; CARRENO, M. N. P</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-pascalfrancis_primary_165468253</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Applied sciences</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><toplevel>online_resources</toplevel><creatorcontrib>ARASHIRO, E. Y</creatorcontrib><creatorcontrib>CARRENO, M. N. P</creatorcontrib><collection>Pascal-Francis</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>ARASHIRO, E. Y</au><au>CARRENO, M. N. P</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications</atitle><btitle>Proceedings - Electrochemical Society</btitle><date>2004</date><risdate>2004</risdate><spage>107</spage><epage>112</epage><pages>107-112</pages><issn>0161-6374</issn><eissn>2576-1579</eissn><isbn>9781566774161</isbn><isbn>1566774160</isbn><cop>Pennington NJ</cop><pub>Electrochemical Society</pub></addata></record>
fulltext	fulltext
identifier	ISSN: 0161-6374
ispartof	Proceedings - Electrochemical Society, 2004, p.107-112
issn	0161-6374 2576-1579
language	eng
recordid	cdi_pascalfrancis_primary_16546825
source	IOP Publishing Journals
subjects	Applied sciences Electronics Exact sciences and technology Micro- and nanoelectromechanical devices (mems/nems) Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title	Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-14T14%3A05%3A04IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Polymeric%20corrugated%20membranes%20of%20PMMA%20fabricated%20by%20micro-casting%20technique%20for%20moems%20and%20optical%20aplications&rft.btitle=Proceedings%20-%20Electrochemical%20Society&rft.au=ARASHIRO,%20E.%20Y&rft.date=2004&rft.spage=107&rft.epage=112&rft.pages=107-112&rft.issn=0161-6374&rft.eissn=2576-1579&rft.isbn=9781566774161&rft.isbn_list=1566774160&rft_id=info:doi/&rft_dat=%3Cpascalfrancis%3E16546825%3C/pascalfrancis%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true