Polymeric corrugated membranes of PMMA fabricated by micro-casting technique for moems and optical aplications

Bibliographische Detailangaben

Hauptverfasser:	ARASHIRO, E. Y, CARRENO, M. N. P
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Micro- and nanoelectromechanical devices (mems/nems) Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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