Study of power balance in electronegative capacitively coupled plasmas

Study of power balance in electronegative capacitively coupled plasmas

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Hauptverfasser: SWART, Laura, VERDONCK, Patrick, MOSHKALYOV, Stanislav A
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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creator SWART, Laura
VERDONCK, Patrick
MOSHKALYOV, Stanislav A
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identifier ISSN: 0161-6374
ispartof Proceedings - Electrochemical Society, 2003, p.302-310
issn 0161-6374
2576-1579
language eng
recordid cdi_pascalfrancis_primary_16546656
source IOP Publishing Journals
subjects Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Study of power balance in electronegative capacitively coupled plasmas
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