Defect generation and suppression in device processes using a shallow trench isolation scheme

Bibliographische Detailangaben

Hauptverfasser:	PESCHIAROLI, D, BRAMBILLA, M, MICA, I, PAVAN, A, PAVIA, G, PIAZZA, F, POLIGNANO, M. L, SONCINI, V, BONERA, E, CARNEVALE, G. P, CASCELLA, A, CAZZANIGA, F, CLEMENTI, C, CREMONESI, C, GILARDINI, A, MARTINELLI, M, MAURELLI, A
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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