Space and time resolved rotational state populations and gas temperatures in an inductively coupled hydrogen RF discharge
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| Veröffentlicht in: | Plasma sources science & technology 2005-02, Vol.14 (1), p.51-60 |
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| container_end_page | 60 |
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| container_issue | 1 |
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| container_title | Plasma sources science & technology |
| container_volume | 14 |
| creator | Abdel-Rahman, M Gans, T Schulz-von der Gathen, V Döbele, H F |
| description | |
| doi_str_mv | 10.1088/0963-0252/14/1/007 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0963-0252 |
| ispartof | Plasma sources science & technology, 2005-02, Vol.14 (1), p.51-60 |
| issn | 0963-0252 1361-6595 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_16531204 |
| source | HEAL-Link subscriptions: Institute of Physics (IOP) Journals; Institute of Physics Journals |
| subjects | Discharges for spectral sources (including inductively coupled plasma) Discharges for spectral sources (including inductively coupled plasmas) Electric discharges Etching and cleaning Exact sciences and technology High-frequency discharges Optical (ultraviolet, visible, infrared) measurements Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Plasma diagnostic techniques and instrumentation |
| title | Space and time resolved rotational state populations and gas temperatures in an inductively coupled hydrogen RF discharge |
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