Space and time resolved rotational state populations and gas temperatures in an inductively coupled hydrogen RF discharge

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Bibliographische Detailangaben
Veröffentlicht in:	Plasma sources science & technology 2005-02, Vol.14 (1), p.51-60
Hauptverfasser:	Abdel-Rahman, M, Gans, T, Schulz-von der Gathen, V, Döbele, H F
Format:	Artikel
Sprache:	eng
Schlagworte:	Discharges for spectral sources (including inductively coupled plasma) Discharges for spectral sources (including inductively coupled plasmas) Electric discharges Etching and cleaning Exact sciences and technology High-frequency discharges Optical (ultraviolet, visible, infrared) measurements Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Plasma diagnostic techniques and instrumentation
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