The influence of the ion bombardment on the optical properties of TiNx and ZrNx coatings

The influence of the ion bombardment on the optical properties of TiNx and ZrNx coatings

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Hauptverfasser: MITTERER, C, MAYRHOFER, P. H, WALDHAUSER, W, KELESOGLU, E, LOSBICHLER, P
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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container_issue 1-3
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container_volume 108-09
creator MITTERER, C
MAYRHOFER, P. H
WALDHAUSER, W
KELESOGLU, E
LOSBICHLER, P
description
format Conference Proceeding
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identifier ISSN: 0257-8972
ispartof Surface & coatings technology, 1998, Vol.108-09 (1-3), p.230-235
issn 0257-8972
1879-3347
language eng
recordid cdi_pascalfrancis_primary_1634139
source Elsevier ScienceDirect Journals
subjects Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title The influence of the ion bombardment on the optical properties of TiNx and ZrNx coatings
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