Improved near surface characterization of shallow arsenic distribution by SIMS depth profiling

Bibliographische Detailangaben

Hauptverfasser:	BÜYÜKLIMANLI, Temel H, MARINO, John W, NOVAK, Steven W
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Physics
Online-Zugang:	Volltext
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