Micro-replication of optical lenses in glass using a novel sol gel technology
A new method to realize arrays of microlenses using a sol gel glass replication technology is presented. Polydimethyl-siloxane (PDMS) master structures are used for the replication of thin glass membranes, which, by an appropriate annealing procedure, result in converging lenses with positive menisc...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | A new method to realize arrays of microlenses using a sol gel glass replication technology is presented. Polydimethyl-siloxane (PDMS) master structures are used for the replication of thin glass membranes, which, by an appropriate annealing procedure, result in converging lenses with positive meniscus. Hereby, we exploit PDMS - sol gel surface interactions and thickness dependent changes in composition of the sol gel solution. The lenses are realized on a circular and square like basis. We characterize the micro-lenses by an optical imaging system and measure their focal length as a function of lens thickness and size. Also lens interference effects are measured. |
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ISSN: | 1084-6999 |
DOI: | 10.1109/MEMSYS.2002.984322 |