Force-controllable, optically driven micromachines fabricated by single-step two-photon micro stereolithography

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of microelectromechanical systems 2003-10, Vol.12 (5), p.533-539
Hauptverfasser:	MARUO, Shoji, IKUTA, Koji, KOROGI, Hayato
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Lithography, masks and pattern transfer Mechanical engineering. Machine design Microelectronic fabrication (materials and surfaces technology) Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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