Epitaxial growth of NH3-doped ZnO thin films on <0 2 24> oriented sapphire substrates

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Veröffentlicht in:	Journal of crystal growth 2003, Vol.255 (3-4), p.293-297
Hauptverfasser:	JINZHONG WANG, GUOTONG DU, SHUREN YANG, BAIJUN ZHAO, XIAOTIAN YANG, YUANTAO ZHANG, YAN MA, DALI LIU, YUCHUN CHANG, HAISONG WANG, HONGJUN YANG
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Defects and impurities: doping, implantation, distribution, concentration, etc Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology Low-field transport and mobility piezoresistance Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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ISSN:	0022-0248 1873-5002