'Semi-insulating' silicon using deep level impurity doping: problems and potential
Gespeichert in:
Veröffentlicht in: | Semiconductor science and technology 2003-06, Vol.18 (6), p.517-524 |
---|---|
Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 524 |
---|---|
container_issue | 6 |
container_start_page | 517 |
container_title | Semiconductor science and technology |
container_volume | 18 |
creator | Mallik, Kanad Falster, R J Wilshaw, P R |
description | |
doi_str_mv | 10.1088/0268-1242/18/6/321 |
format | Article |
fullrecord | <record><control><sourceid>pascalfrancis_iop_p</sourceid><recordid>TN_cdi_pascalfrancis_primary_14843109</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>14843109</sourcerecordid><originalsourceid>FETCH-LOGICAL-c347t-3462aedfe7faf64776b5cff346f07496a0a793ca15f17ed8334a806cdd27108b3</originalsourceid><addsrcrecordid>eNp9kE1LAzEQhoMoWKt_wFMuUjysm9mkSepNil9QEPw4hzQfEkl3w2Yr9N-bUqmHgqdh5n3eYd5B6BLIDRApa9JwWUHDmhpkzWvawBEaAeVQcc7gGI32wCk6y_mLEABJyQi9Tt7cKlShzeuoh9B-TnAOMZiuxetcWmydSzi6bxdxWKV1H4YNtl0q0i1OfbeMbpWxbi1O3eDaIeh4jk68jtld_NYx-ni4f58_VYuXx-f53aIylImhoow32lnvhNeeMyH4cmq8L2NPBJtxTbSYUaNh6kE4KyllWhJurG1EybykY9Ts9pq-y7l3XqU-rHS_UUDU9itqG1ptQyuQiqvylWK62pmSzkZH3-vWhPznZJJRILPCXe-40KW9erhPJesLWx2y_9zwA5ftfQc</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>'Semi-insulating' silicon using deep level impurity doping: problems and potential</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Mallik, Kanad ; Falster, R J ; Wilshaw, P R</creator><creatorcontrib>Mallik, Kanad ; Falster, R J ; Wilshaw, P R</creatorcontrib><identifier>ISSN: 0268-1242</identifier><identifier>EISSN: 1361-6641</identifier><identifier>DOI: 10.1088/0268-1242/18/6/321</identifier><identifier>CODEN: SSTEET</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Conductivity of specific materials ; Electron states ; Electronic transport in condensed matter ; Elemental semiconductors ; Exact sciences and technology ; Impurity and defect levels ; Physics</subject><ispartof>Semiconductor science and technology, 2003-06, Vol.18 (6), p.517-524</ispartof><rights>2003 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c347t-3462aedfe7faf64776b5cff346f07496a0a793ca15f17ed8334a806cdd27108b3</citedby><cites>FETCH-LOGICAL-c347t-3462aedfe7faf64776b5cff346f07496a0a793ca15f17ed8334a806cdd27108b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0268-1242/18/6/321/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53830,53910</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=14843109$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Mallik, Kanad</creatorcontrib><creatorcontrib>Falster, R J</creatorcontrib><creatorcontrib>Wilshaw, P R</creatorcontrib><title>'Semi-insulating' silicon using deep level impurity doping: problems and potential</title><title>Semiconductor science and technology</title><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Conductivity of specific materials</subject><subject>Electron states</subject><subject>Electronic transport in condensed matter</subject><subject>Elemental semiconductors</subject><subject>Exact sciences and technology</subject><subject>Impurity and defect levels</subject><subject>Physics</subject><issn>0268-1242</issn><issn>1361-6641</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><recordid>eNp9kE1LAzEQhoMoWKt_wFMuUjysm9mkSepNil9QEPw4hzQfEkl3w2Yr9N-bUqmHgqdh5n3eYd5B6BLIDRApa9JwWUHDmhpkzWvawBEaAeVQcc7gGI32wCk6y_mLEABJyQi9Tt7cKlShzeuoh9B-TnAOMZiuxetcWmydSzi6bxdxWKV1H4YNtl0q0i1OfbeMbpWxbi1O3eDaIeh4jk68jtld_NYx-ni4f58_VYuXx-f53aIylImhoow32lnvhNeeMyH4cmq8L2NPBJtxTbSYUaNh6kE4KyllWhJurG1EybykY9Ts9pq-y7l3XqU-rHS_UUDU9itqG1ptQyuQiqvylWK62pmSzkZH3-vWhPznZJJRILPCXe-40KW9erhPJesLWx2y_9zwA5ftfQc</recordid><startdate>20030601</startdate><enddate>20030601</enddate><creator>Mallik, Kanad</creator><creator>Falster, R J</creator><creator>Wilshaw, P R</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20030601</creationdate><title>'Semi-insulating' silicon using deep level impurity doping: problems and potential</title><author>Mallik, Kanad ; Falster, R J ; Wilshaw, P R</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c347t-3462aedfe7faf64776b5cff346f07496a0a793ca15f17ed8334a806cdd27108b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Conductivity of specific materials</topic><topic>Electron states</topic><topic>Electronic transport in condensed matter</topic><topic>Elemental semiconductors</topic><topic>Exact sciences and technology</topic><topic>Impurity and defect levels</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Mallik, Kanad</creatorcontrib><creatorcontrib>Falster, R J</creatorcontrib><creatorcontrib>Wilshaw, P R</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Semiconductor science and technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Mallik, Kanad</au><au>Falster, R J</au><au>Wilshaw, P R</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>'Semi-insulating' silicon using deep level impurity doping: problems and potential</atitle><jtitle>Semiconductor science and technology</jtitle><date>2003-06-01</date><risdate>2003</risdate><volume>18</volume><issue>6</issue><spage>517</spage><epage>524</epage><pages>517-524</pages><issn>0268-1242</issn><eissn>1361-6641</eissn><coden>SSTEET</coden><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/0268-1242/18/6/321</doi><tpages>8</tpages></addata></record> |
fulltext | fulltext |
identifier | ISSN: 0268-1242 |
ispartof | Semiconductor science and technology, 2003-06, Vol.18 (6), p.517-524 |
issn | 0268-1242 1361-6641 |
language | eng |
recordid | cdi_pascalfrancis_primary_14843109 |
source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Conductivity of specific materials Electron states Electronic transport in condensed matter Elemental semiconductors Exact sciences and technology Impurity and defect levels Physics |
title | 'Semi-insulating' silicon using deep level impurity doping: problems and potential |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-05T15%3A47%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis_iop_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle='Semi-insulating'%20silicon%20using%20deep%20level%20impurity%20doping:%20problems%20and%20potential&rft.jtitle=Semiconductor%20science%20and%20technology&rft.au=Mallik,%20Kanad&rft.date=2003-06-01&rft.volume=18&rft.issue=6&rft.spage=517&rft.epage=524&rft.pages=517-524&rft.issn=0268-1242&rft.eissn=1361-6641&rft.coden=SSTEET&rft_id=info:doi/10.1088/0268-1242/18/6/321&rft_dat=%3Cpascalfrancis_iop_p%3E14843109%3C/pascalfrancis_iop_p%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |