Contrasting single-wafer and batch processing for memory devices : Single-wafer manufacturing in the nanochip era

Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2003, Vol.16 (2), p.138-146
Hauptverfasser:	WEIMER, Ronald A, EPPICH, Denise Marra, BEAMAN, Kevin L, POWELL, D. Carl, GONZALEZ, Fernando
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Integrated circuits Integrated circuits by function (including memories and processors) Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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