Polymer-based stress sensor with integrated readout

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2002-11, Vol.35 (21), p.2698-2703
Hauptverfasser:	Thaysen, J, Yalçinkaya, A D, Vettiger, P, Menon, A
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices and systems Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing
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