Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

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Bibliographische Detailangaben
Hauptverfasser:	TOMITA, M, SUZUKI, M, TACHIBE, T, KOZUKA, S, MURAKOSHI, A
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Atomic, molecular, and ion beam impact and interactions with surfaces Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Doping and impurity implantation in germanium and silicon Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Physics Structure of solids and liquids crystallography
Online-Zugang:	Volltext
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ISSN:	0169-4332 1873-5584