Experimental results of a dc glow discharge source with controlled plasma floating potential for plasma immersion ion implantation

Experimental results of a dc glow discharge source with controlled plasma floating potential for plasma immersion ion implantation

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2000-07, Vol.33 (13), p.1592-1595
Hauptverfasser: Berni, L A, Ueda, M, Gomes, G F, Beloto, A F, Reuther, H
Format: Artikel
Sprache:eng
Schlagworte:
Electric discharges
Exact sciences and technology
Glow
corona
Ionization of plasmas
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma properties
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container_end_page 1595
container_issue 13
container_start_page 1592
container_title Journal of physics. D, Applied physics
container_volume 33
creator Berni, L A
Ueda, M
Gomes, G F
Beloto, A F
Reuther, H
description
doi_str_mv 10.1088/0022-3727/33/13/306
format Article
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ispartof Journal of physics. D, Applied physics, 2000-07, Vol.33 (13), p.1592-1595
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1361-6463
language eng
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source Institute of Physics Journals
subjects Electric discharges
Exact sciences and technology
Glow
corona
Ionization of plasmas
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma properties
title Experimental results of a dc glow discharge source with controlled plasma floating potential for plasma immersion ion implantation
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