Effect of VB2 RF magnetron sputtering conditions on the composition and structure of deposited films

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Bibliographische Detailangaben
Veröffentlicht in:	Inorganic materials 2001-10, Vol.37 (10), p.1021-1023
Hauptverfasser:	IGNATENKO, P. I, TERPII, D. N, PETUKHOV, V. V, GONCHAROV, A. A
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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