Magnetic field assisted increase of growth rate and reduction of particulate incorporation in pulsed laser deposited boron nitride films

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Bibliographische Detailangaben
Hauptverfasser:	WEIBMANTEL, Steffen, ROST, Dirk, REISSE, Günter
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Laser-beam impact phenomena Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma production and heating Plasma production and heating by laser beams
Online-Zugang:	Volltext
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ISSN:	0169-4332 1873-5584