Cleaning of erosion plasma generated by a high-current non-self-maintained arc discharge from microdroplets

Bibliographische Detailangaben

Hauptverfasser:	SAFONOV, V. I, BELOUS, V. A, KARTMAZOV, G. N
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
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