Pulsed laser deposition of novel nitride solid solution films NixTi1-xNy on MgO(0 0 1)

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Veröffentlicht in:	Applied surface science 2002-10, Vol.199 (1-4), p.303-306
Hauptverfasser:	SAKAMOTO, Koyo, INUMARU, Kei, YAMANAKA, Shoji
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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