Two-step growth of ZnO thin films on diamond/Si by low-pressure metal-organic chemical vapour deposition

The two-step growth method was used to grow high-quality ZnO thin film on polycrystalline diamond/Si with (001) orientation by low-pressure metal-organic chemical vapor deposition. X-ray diffraction spectra and the photoluminescence (PL) spectra clearly showed that the quality of ZnO film was improved by the two-step growth method. Strong ultraviolet emission was observed while deep level emission could be hardly observed in the room-temperature PL spectrum of ZnO thin film grown by two-step method. Emission from excitons bound to donors was observed in the 100 K PL spectrum. (Author)