Growth process and interfacial structure of epitaxial Y2O3/Si thin films deposited by pulsed laser deposition

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Bibliographische Detailangaben
Hauptverfasser:	KAKUNO, Kosuke, ITO, Daisuke, FUJIMURA, Norifumi, MATSUI, Toshiyuki, ITO, Taichiro
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Laser deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Niobates, titanates, tantalates, pzt ceramics, etc Physics
Online-Zugang:	Volltext
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