Micro- and nano- engineering 2001, MNE: proceedings of the 27th international conference on micro- and nano-engineering, September 16-19, 2001, Grenoble, France

Bibliographische Detailangaben

Hauptverfasser:	JOUBERT, Olivier, PERROCHEAU, Jacques, TEDESCO, Serge
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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