Calibration of standards for precision pitch measurement in the nanometre region by combined scanning tunnelling microscopy and x-ray interferometry

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Veröffentlicht in:	Nanotechnology 1999-12, Vol.10 (4), p.412-417
Hauptverfasser:	Lin, Wang, Kuetgens, Ulrich, Becker, Peter, Koenders, Ludger, Dacheng, Li, Mang, Cao
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Metrology Metrology, measurements and laboratory procedures Physics Units and standards X- and γ-ray instruments and techniques
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