Innovative design and modelling of a micromechanical relay with electrostatic actuation: Special Issue Featuring Papers from the 11th Micromechanics Europe Workshop (MME'00)

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Veröffentlicht in:	Journal of micromechanics and microengineering 2001, Vol.11 (4), p.428-433
Hauptverfasser:	SATTLER, Robert, VOIGT, Peter, PRADEL, Helmut, WACHUTKA, Gerhard
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Computational techniques Exact sciences and technology Finite-element and galerkin methods Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mathematical methods in physics Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Micromechanical devices and systems Physics Precision engineering, watch making
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ISSN:	0960-1317 1361-6439