High-resolution x-ray topography of dislocations in 4H-SiC epilayers

Synchrotron x-ray topography with a high-resolution setup using 1128 reflection was carried out on 4H-SiC epilayers. Four different shapes of threading-edge dislocation according to Burgers vector direction were observed. The four types of threading-edge dislocation images were calculated by compute...

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Veröffentlicht in:	Journal of materials research 2007-04, Vol.22 (4), p.845-849
Hauptverfasser:	Kamata, Isaho, Tsuchida, Hidekazu, Vetter, William M., Dudley, Michael
Format:	Artikel
Sprache:	eng
Schlagworte:	BURGERS VECTOR COMPUTERIZED SIMULATION DISLOCATIONS national synchrotron light source Outstanding Meeting Papers:Review PARTICLE ACCELERATORS REFLECTION SCREW DISLOCATIONS SIMULATION SYNCHROTRONS TOPOGRAPHY
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