Bismuth surfactant effects for GaAsN and beryllium doping of GaAsN and GaInAsN grown by molecular beam epitaxy
Bi was investigated as a possible surfactant for growth of GaAs 1− x N x layers on (1 0 0) GaAs substrates by molecular beam epitaxy (MBE) using a radio frequency (RF) plasma nitrogen source. Importantly, Bi extends the useable growth conditions producing smoother surfaces to a significantly higher...
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Veröffentlicht in: | Journal of crystal growth 2007-06, Vol.304 (2), p.402-406 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Bi was investigated as a possible surfactant for growth of GaAs
1−
x
N
x
layers on (1
0
0) GaAs substrates by molecular beam epitaxy (MBE) using a radio frequency (RF) plasma nitrogen source. Importantly, Bi extends the useable growth conditions producing smoother surfaces to a significantly higher group V fractional N content than without Bi, enhancing possibilities for growth of structures requiring a larger nitrogen content. The conductivity of Be-doped GaAsN and GaInAsN decreased significantly with increasing N concentration. Temperature-dependent Hall measurement suggests possible compensation and increased activation energy. SIMS and Raman measurements indicate that the N composition increased with introducing Be, and for low [N], with the presence of Bi. The addition of Bi during growth of Be-doped GaAsN only produced semi-insulating layers at all concentrations investigated suggesting it enhances the formation of compensating defects. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/j.jcrysgro.2007.04.013 |