Multiple-input microcantilever sensors

Multiple-input microcantilever sensors

A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Co...

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Veröffentlicht in:Ultramicroscopy 2000-02, Vol.82 (1), p.17-21
Hauptverfasser: Britton, C.L, Jones, R.L, Oden, P.I, Hu, Z, Warmack, R.J, Smith, S.F, Bryan, W.L, Rochelle, J.M
Format: Artikel
Sprache:eng
Schlagworte:
Absorption-induced stress
DATA ACQUISITION
DESIGN
Microcantilever
MONITORS
Multiple-input chemical sensing
OTHER INSTRUMENTATION
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Beschreibung
Zusammenfassung:A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.
ISSN:0304-3991
1879-2723
DOI:10.1016/S0304-3991(99)00155-2