Characterization of thermal distortion effects on beamline optics for EUV interferometry and soft x-ray microscopy

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Veröffentlicht in:	Review of scientific instruments 1996-01, Vol.67
Hauptverfasser:	Beguiristain, H. Raul, Underwood, James H., Koike, Masato, Batson, Phillip J., Medecki, Hector, Rekawa, S., Jackson, Keith H., Attwood, David T.
Format:	Artikel
Sprache:	eng
Schlagworte:	ADVANCED LIGHT SOURCE ADVANCED LIGHT SOURCE ALS INTERFEROMETRY MICROSCOPY OPTICS PARTICLE ACCELERATORS
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doi_str_mv	10.1063/1.1147403
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source	AIP Digital Archive
subjects	ADVANCED LIGHT SOURCE ADVANCED LIGHT SOURCE ALS INTERFEROMETRY MICROSCOPY OPTICS PARTICLE ACCELERATORS
title	Characterization of thermal distortion effects on beamline optics for EUV interferometry and soft x-ray microscopy
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