Annealing of nonhydrogenated amorphous carbon films prepared by filtered cathodic arc deposition

The effect of postdeposition annealing to 600 °C in vacuum on the hardness, modulus, film stress, and sp3 content of nonhydrogenated amorphous carbon was studied. The films were deposited using a filtered cathodic arc source and the film properties were varied by controlling the substrate bias. In f...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of applied physics 2000-09, Vol.88 (5), p.2395-2399
Hauptverfasser: Monteiro, O. R., Ager, J. W., Lee, D. H., Yu Lo, R., Walter, K. C., Nastasi, M.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The effect of postdeposition annealing to 600 °C in vacuum on the hardness, modulus, film stress, and sp3 content of nonhydrogenated amorphous carbon was studied. The films were deposited using a filtered cathodic arc source and the film properties were varied by controlling the substrate bias. In films with an initial sp3 content of greater than 80% a significant decrease (from 10.5 GPa to less than 2 GPa) in the level of compressive stress was observed without deterioration of the mechanical properties. In films with an initial sp3 content of 50%, the stress and hardness remained constant. Films with lower sp3 content showed a significant increase in the level of stresses and only a marginal decrease in hardness. The evolution of stresses and hardness with annealing is discussed in light of a proposed microstructure of these amorphous films.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1288221