Patterned electrical conductance and electrode formation in ion-implanted diamond films

Implantation of 140 keV Co ions greatly increases electrical conductivity of CVD diamond films by local conversion to graphite (or near graphite). The implanted diamond film is used to fabricate a rotating disk electrode.

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of the Electrochemical Society 1994-04, Vol.141 (4), p.L41-L43
Hauptverfasser:	MILLER, B, KALISH, R, FELDMAN, L. C, KATZ, A, MORIYA, N, SHORT, K, WHITE, A. E
Format:	Artikel
Sprache:	eng
Schlagworte:	360605 - Materials- Radiation Effects CARBON CHEMISTRY COBALT DIAMONDS ELECTRIC CONDUCTIVITY ELECTRICAL PROPERTIES ELECTROCHEMISTRY Electrodes: preparations and properties ELEMENTAL MINERALS ELEMENTS Exact sciences and technology General and physical chemistry ION IMPLANTATION MATERIALS SCIENCE METALS MINERALS NONMETALS Other electrodes PHYSICAL PROPERTIES SURFACE PROPERTIES THIN FILMS TRANSITION ELEMENTS
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Beschreibung
Zusammenfassung:	Implantation of 140 keV Co ions greatly increases electrical conductivity of CVD diamond films by local conversion to graphite (or near graphite). The implanted diamond film is used to fabricate a rotating disk electrode.
ISSN:	0013-4651 1945-7111
DOI:	10.1149/1.2054873