Mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices measured by nanoindentation

We have used nanoindentation to measure the mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices, grown on MgO(100), as a function of the wavelength λ. The V/Nb ratio within the VNbN layers was chosen to provide a lattice match with TiN, minimizing effects resulting from coherency strai...

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Veröffentlicht in:	Journal of applied physics 1992-11, Vol.72 (9), p.4466-4468
Hauptverfasser:	HUBBARD, K. M, JERVIS, T. R, MIRKARIMI, P. B, BARNETT, S. A
Format:	Artikel
Sprache:	eng
Schlagworte:	360103 - Metals & Alloys- Mechanical Properties COHERENT SCATTERING Condensed matter: structure, mechanical and thermal properties DIFFRACTION ELASTICITY Exact sciences and technology HARDNESS Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties MATERIALS SCIENCE MECHANICAL PROPERTIES NIOBIUM COMPOUNDS NIOBIUM NITRIDES NITRIDES NITROGEN COMPOUNDS Physics PNICTIDES REFRACTORY METAL COMPOUNDS SCATTERING SUPERLATTICES Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) TENSILE PROPERTIES TITANIUM COMPOUNDS TITANIUM NITRIDES TRANSITION ELEMENT COMPOUNDS VANADIUM COMPOUNDS VANADIUM NITRIDES X-RAY DIFFRACTION
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Zusammenfassung:	We have used nanoindentation to measure the mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices, grown on MgO(100), as a function of the wavelength λ. The V/Nb ratio within the VNbN layers was chosen to provide a lattice match with TiN, minimizing effects resulting from coherency strains. For λ≥4 nm, the hardness was found to be significantly enhanced relative to a homogeneous reference film of the same average composition. For λ
ISSN:	0021-8979 1089-7550
DOI:	10.1063/1.352177