Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition

Thermochemical considerations clearly indicate a need for the protection of SiC and Si3N4 materials from HC1‐ and Na2SO4‐induced corrosion. Ta2O5 has been identified as a material which may be suitable for such a protective coating. Thermodynamic calculations have indicated a range of temperatures,...

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Veröffentlicht in:Journal of the American Ceramic Society 1994-09, Vol.77 (9), p.2298-2304
Hauptverfasser: Graham, David W., Stinton, David P.
Format: Artikel
Sprache:eng
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