Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition

Thermochemical considerations clearly indicate a need for the protection of SiC and Si3N4 materials from HC1‐ and Na2SO4‐induced corrosion. Ta2O5 has been identified as a material which may be suitable for such a protective coating. Thermodynamic calculations have indicated a range of temperatures,...

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Veröffentlicht in:	Journal of the American Ceramic Society 1994-09, Vol.77 (9), p.2298-2304
Hauptverfasser:	Graham, David W., Stinton, David P.
Format:	Artikel
Sprache:	eng
Schlagworte:	360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication 360205 - Ceramics, Cermets, & Refractories- Corrosion & Erosion ALKALI METAL COMPOUNDS Applied sciences Building materials. Ceramics. Glasses CARBIDES CARBON COMPOUNDS Ceramic industries CHALCOGENIDES CHEMICAL COATING Chemical industry and chemicals CHEMICAL VAPOR DEPOSITION CHLORINE COMPOUNDS COATINGS CORROSION PROTECTION DEPOSITION ENGINES Exact sciences and technology HALOGEN COMPOUNDS HEAT ENGINES HYDROCHLORIC ACID HYDROGEN COMPOUNDS INORGANIC ACIDS MATERIALS SCIENCE NITRIDES NITROGEN COMPOUNDS OXIDES OXYGEN COMPOUNDS PNICTIDES PROTECTIVE COATINGS REFRACTORY METAL COMPOUNDS SILICON CARBIDES SILICON COMPOUNDS SILICON NITRIDES SODIUM COMPOUNDS SODIUM SULFATES Structural ceramics SULFATES SULFUR COMPOUNDS SURFACE COATING TANTALUM COMPOUNDS TANTALUM OXIDES Technical ceramics TRANSITION ELEMENT COMPOUNDS
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Beschreibung
Zusammenfassung:	Thermochemical considerations clearly indicate a need for the protection of SiC and Si3N4 materials from HC1‐ and Na2SO4‐induced corrosion. Ta2O5 has been identified as a material which may be suitable for such a protective coating. Thermodynamic calculations have indicated a range of temperatures, pressures, and reactant concentrations under which Ta2O5 coatings may be formed as a single phase by chemical vapor deposition. Ta2O5 coatings exhibiting a range of microstructures were obtained experimentally.
ISSN:	0002-7820 1551-2916
DOI:	10.1111/j.1151-2916.1994.tb04597.x