Variable growth modes of CaF[sub 2] on Si(111) determined by x-ray photoelectron diffraction

Chemical discrimination of bulk and interface Ca 2[ital p] x-ray photoelectron diffraction modulations is used to identify three growth regimes during the initial stages of CaF[sub 2] epitaxy on Si(111). Low flux, high temperature conditions produce island growth atop a nonwetting, chemically reacted Ca-F interface layer. Changing the growth kinetics by increasing the flux produces more laminar growth. Lowering the substrate temperature produces a more stoichiometric CaF[sub 2] interface layer that results in immediate wetting and laminar growth.