Molecular dynamics of silicon indentation
We use nonequilibrium molecular dynamics to simulate the elastic-plastic deformation of silicon under tetrahedral nanometer-sized indentors. The results are described in terms of a rate-dependent and temperature-dependent phenomenological yield strength. We follow the structural change during indent...
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Veröffentlicht in: | Physical review. B, Condensed matter Condensed matter, 1993-04, Vol.47 (13), p.7705-7709 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We use nonequilibrium molecular dynamics to simulate the elastic-plastic deformation of silicon under tetrahedral nanometer-sized indentors. The results are described in terms of a rate-dependent and temperature-dependent phenomenological yield strength. We follow the structural change during indentation with a computer technique that allows us to model the dynamic simulation of diffraction patterns. |
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ISSN: | 0163-1829 1095-3795 |
DOI: | 10.1103/PhysRevB.47.7705 |