Experimental Whisker Growth and Thermodynamic Study of the Hafnium-Carbon System for Chemical Vapor Deposition Applications

Chemical vapor deposition of nonstoichiometric hafnium carbide is studied by computer minimization of the Gibbs free energy of the system. Isostoichiometric curves in the HfC1‐x region of the deposition diagram are calculated as a function of HfCI4, CH4, and H2 concentration and reaction temperature...

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Veröffentlicht in:	Journal of the American Ceramic Society 1990-06, Vol.73 (6), p.1593-1598
Hauptverfasser:	Lackey, W. J., Hanigofsky, John A., Freeman, Garth B.
Format:	Artikel
Sprache:	eng
Schlagworte:	360202 - Ceramics, Cermets, & Refractories- Structure & Phase Studies 360204 - Ceramics, Cermets, & Refractories- Physical Properties 656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-) 656100 - Condensed Matter Physics- Superconductivity ALKANES Applied sciences Building materials. Ceramics. Glasses CALCULATION METHODS CARBIDES CARBON COMPOUNDS Ceramic and carbon fibers Ceramic industries CHEMICAL COATING Chemical industry and chemicals CHEMICAL VAPOR DEPOSITION CHLORIDES CHLORINE COMPOUNDS COMPOSITE MATERIALS composites CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY DEPOSITION DIAGRAMS ELEMENTS Exact sciences and technology hafnium HAFNIUM CARBIDES HAFNIUM CHLORIDES HAFNIUM COMPOUNDS HALIDES HALOGEN COMPOUNDS HYDROCARBONS HYDROGEN MATERIALS MATERIALS SCIENCE METHANE NONMETALS ORGANIC COMPOUNDS PARTIAL PRESSURE PHASE DIAGRAMS PHYSICAL PROPERTIES REFRACTORY METAL COMPOUNDS STOICHIOMETRY SUPERCONDUCTING COMPOSITES SURFACE COATING Technical ceramics THERMODYNAMIC PROPERTIES thermodynamics TRANSITION ELEMENT COMPOUNDS whiskers
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Beschreibung
Zusammenfassung:	Chemical vapor deposition of nonstoichiometric hafnium carbide is studied by computer minimization of the Gibbs free energy of the system. Isostoichiometric curves in the HfC1‐x region of the deposition diagram are calculated as a function of HfCI4, CH4, and H2 concentration and reaction temperature. Possible experimental reactions are investigated using thermodynamic efficiency and partial pressure diagrams. A comparison between the calculated solid‐phase regions and the HfC phase diagram is given, and experimental results for HfC whiskers are also compared with the calculations.
ISSN:	0002-7820 1551-2916
DOI:	10.1111/j.1151-2916.1990.tb09801.x