First results with a high‐imaging speed scanning electron microscope

We have built a scanning electron microscope (SEM) capable of ≳1 kHz framing rate, with the large depth of focus and high resolution which make SEM generally superior to light microscopes. SEM also permits submicron mapping of voltages or magnetic field lines on integrated circuits or observation of flux lattice processes in high temperature superconductors. Increasing framing rate by 101–104 times that presently available (so‐called TV rate−30–50 Hz) permits a variety of new dynamic microscopy studies. We refer to this microscope as a fast‐scan electron microscope, or FSEM.