Investigations of the growth of TiN thin films from Ti(NMe[sub 2])[sub 4] and ammonia

Growth of clean (

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Journal of the Electrochemical Society 1993-09, Vol.140:9
Hauptverfasser:	Prybyla, J.A., Chiang, C.M., Dubois, L.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication AMMONIA CHEMICAL COATING CHEMICAL REACTION KINETICS CHEMICAL VAPOR DEPOSITION COATINGS DATA DEPOSITION ELEMENTS EXPERIMENTAL DATA HYDRIDES HYDROGEN COMPOUNDS INFORMATION ISOTOPE APPLICATIONS KINETICS MATERIALS SCIENCE NITRIDES NITROGEN COMPOUNDS NITROGEN HYDRIDES NUMERICAL DATA ORGANIC COMPOUNDS ORGANOMETALLIC COMPOUNDS PNICTIDES REACTION INTERMEDIATES REACTION KINETICS SEMIMETALS SILICON SURFACE COATING TITANIUM COMPOUNDS TITANIUM NITRIDES TRACER TECHNIQUES TRANSITION ELEMENT COMPOUNDS VAPOR DEPOSITED COATINGS
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