Self-directed control of pulsed laser deposition
Implementation of self-directed control of pulsed laser deposition (PLD) requires actuators, sensors, and a materials and processing knowledge base. Improvements in quality and reproducibility of material deposits are achieved by driving the process toward desired operating regions. Empirical relati...
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Veröffentlicht in: | Journal of materials engineering and performance 1993-10, Vol.2 (5), p.721-725 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Implementation of self-directed control of pulsed laser deposition (PLD) requires actuators, sensors, and a materials and processing knowledge base. Improvements in quality and reproducibility of material deposits are achieved by driving the process toward desired operating regions. Empirical relationships are determined experimentally to describe the complex dynamical interactions of laser parameters. Feedback control based on this description can then be implemented to reduce process disorder and effectively produce consistent coatings with desired properties. |
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ISSN: | 1059-9495 1544-1024 |
DOI: | 10.1007/BF02650062 |