Design and verification of nearly ideal flow and heat transfer in a rotating disk chemical vapor deposition reactor

A research chemical vapor deposition reactor design is presented for a rotating disk configuration. The reactor can be operated under conditions such that nearly ideal, one-dimensional, infinite-radius disk behavior is achieved over most of the disk surface. Boundary conditions, flow stability under both isothermal and heated-disk conditions, and gas temperatures are addressed with both one- and two-dimensional numerical fluid mechanics models. In this paper experimental verification of the design using flow visualization and laser Raman thermometry are presented.