Equipment simulation of selective tungsten deposition

The numerical modeling of a cold wall reactor for selective tungsten chemical vapor deposition is presented. In a two-dimensional simulation the mass and heat transfer equations were solved considering the five chemical species H sub 2 , WF sub 6 , HF, WF sub x , SiF sub y . Detailed models for mult...

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Veröffentlicht in:	Journal of the Electrochemical Society 1992-02, Vol.139 (2), p.566-574
Hauptverfasser:	WERNER, C, ULACIA, J. I, HOPFMANN, C, FLYNN, P
Format:	Artikel
Sprache:	eng
Schlagworte:	30 DIRECT ENERGY CONVERSION 300505 - Fuel Cells- Electrochemistry, Mass Transfer & Thermodynamics 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication 400400 - Electrochemistry Applied sciences CHEMICAL COATING CHEMICAL REACTORS CHEMICAL VAPOR DEPOSITION Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology DEPOSITION DESIGN ELECTROCHEMICAL COATING ELEMENTS ENERGY TRANSFER Exact sciences and technology FLUORIDES FLUORINE COMPOUNDS HALIDES HALOGEN COMPOUNDS HEAT TRANSFER HYDROFLUORIC ACID HYDROGEN HYDROGEN COMPOUNDS INORGANIC ACIDS INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY MASS TRANSFER MATERIALS SCIENCE METALS Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy NONMETALS NUCLEATION Physics REFRACTORY METAL COMPOUNDS SURFACE COATING TRANSITION ELEMENT COMPOUNDS TRANSITION ELEMENTS TUNGSTEN TUNGSTEN COMPOUNDS TUNGSTEN FLUORIDES TWO-DIMENSIONAL CALCULATIONS
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Beschreibung
Zusammenfassung:	The numerical modeling of a cold wall reactor for selective tungsten chemical vapor deposition is presented. In a two-dimensional simulation the mass and heat transfer equations were solved considering the five chemical species H sub 2 , WF sub 6 , HF, WF sub x , SiF sub y . Detailed models for multicomponent diffusion and for the autocatalytic tungsten nucleation process were implemented. Model results are in good agreement with experimental findings. The simulations are used to study the impact of reactor design on selectivity.
ISSN:	0013-4651 1945-7111
DOI:	10.1149/1.2069259