A composite layer of Al-Er-O particles in a silicon matrix

Al layer is evaporated onto Si crystal substrates and then implanted with Er sup + ions. After oxidizing, annealed microparticles in the Al layer become strongly cathodoluminescent.

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of the Electrochemical Society 1991-06, Vol.138 (6), p.1761-1764
Hauptverfasser:	SALVI, M, L'HARIDON, H, FAVENNEC, P. N, MOUTONNET, D, GAUNEAU, M, KECHOUANE, M
Format:	Artikel
Sprache:	eng
Schlagworte:	360602 - Other Materials- Structure & Phase Studies 360606 - Other Materials- Physical Properties- (1992-) 400101 - Activation, Nuclear Reaction, Radiometric & Radiochemical Procedures 664200 - Spectra of Atoms & Molecules & their Interactions with Photons- (1992-) ALUMINIUM COMPOUNDS ALUMINIUM OXIDES ANNEALING ATOMIC AND MOLECULAR PHYSICS BACKSCATTERING CHALCOGENIDES CHEMICAL COMPOSITION COMMUNICATIONS COMPOSITE MATERIALS Condensed matter: structure, mechanical and thermal properties CRYSTAL DOPING ELEMENTS EMISSION ERBIUM COMPOUNDS ERBIUM OXIDES EVAPORATION Exact sciences and technology GARNETS HEAT TREATMENTS IMPURITIES INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY ION IMPLANTATION LUMINESCENCE MASS SPECTRA MATERIALS MATERIALS SCIENCE MATRIX MATERIALS MINERALS OXIDES OXYGEN COMPOUNDS PHASE TRANSFORMATIONS PHOTOEMISSION Physics RARE EARTH COMPOUNDS SCATTERING SECONDARY EMISSION SEMICONDUCTOR MATERIALS SEMIMETALS SILICATE MINERALS SILICATES SILICON SILICON COMPOUNDS SPECTRA SUBSTRATES Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) THIN FILMS
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Beschreibung
Zusammenfassung:	Al layer is evaporated onto Si crystal substrates and then implanted with Er sup + ions. After oxidizing, annealed microparticles in the Al layer become strongly cathodoluminescent.
ISSN:	0013-4651 1945-7111
DOI:	10.1149/1.2085869