Interfacial reactions between metal and gallium arsenide

The phase formation sequence for GaAs/metal ternary diffusion couples is discussed. The diffusion path concept is introduced and is used with the phase diagram to understand interfacial reactions between GaAs and metal. The correlation between growth kinetics and interface morphology is discussed. S...

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Veröffentlicht in:Journal of the Electrochemical Society 1989-10, Vol.136 (10), p.3006-3010
Hauptverfasser: LIN, J.-C, SCHULZ, K. J, HSIEH, K.-C, CHANG, Y. A
Format: Artikel
Sprache:eng
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Zusammenfassung:The phase formation sequence for GaAs/metal ternary diffusion couples is discussed. The diffusion path concept is introduced and is used with the phase diagram to understand interfacial reactions between GaAs and metal. The correlation between growth kinetics and interface morphology is discussed. Studies of bulk and thin film couples in two systems, GaAs/Pd and GaAs/Pt, are given to illustrate these concepts.
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2096392