Heteroepitaxy of GaP Nucleation Layers on Si by Molecular Beam Epitaxy

The growth of single crystalline GaP nucleation and buffer layers on Si substrates by molecular-beam epitaxy is demonstrated. The use of two different regimes of migration-enhanced epitaxy was studied. It was found that p–n junctions can be created due to the interdiffusion during the growth of GaP...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2018-12, Vol.52 (16), p.2128-2131
Hauptverfasser: Sobolev, M. S., Lazarenko, A. A., Mizerov, A. M., Nikitina, E. V., Pirogov, E. V., Timoshnev, S. N., Bouravleuv, A. D.
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Sprache:eng
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Zusammenfassung:The growth of single crystalline GaP nucleation and buffer layers on Si substrates by molecular-beam epitaxy is demonstrated. The use of two different regimes of migration-enhanced epitaxy was studied. It was found that p–n junctions can be created due to the interdiffusion during the growth of GaP layer on p -type Si substrate.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782618160327