Heteroepitaxy of GaP Nucleation Layers on Si by Molecular Beam Epitaxy
The growth of single crystalline GaP nucleation and buffer layers on Si substrates by molecular-beam epitaxy is demonstrated. The use of two different regimes of migration-enhanced epitaxy was studied. It was found that p–n junctions can be created due to the interdiffusion during the growth of GaP...
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Veröffentlicht in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2018-12, Vol.52 (16), p.2128-2131 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The growth of single crystalline GaP nucleation and buffer layers on Si substrates by molecular-beam epitaxy is demonstrated. The use of two different regimes of migration-enhanced epitaxy was studied. It was found that
p–n
junctions can be created due to the interdiffusion during the growth of GaP layer on
p
-type Si substrate. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782618160327 |