Template Synthesis of Monodisperse Submicrometer Spherical Nanoporous Silicon Particles

Monodisperse spherical nanoporous silicon ( np -Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material ( a...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2019-08, Vol.53 (8), p.1048-1053
Hauptverfasser: Kurdyukov, D. A., Feoktistov, N. A., Kirilenko, D. A., Smirnov, A. N., Davydov, V. Yu, Golubev, V. G.
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container_end_page 1053
container_issue 8
container_start_page 1048
container_title Semiconductors (Woodbury, N.Y.)
container_volume 53
creator Kurdyukov, D. A.
Feoktistov, N. A.
Kirilenko, D. A.
Smirnov, A. N.
Davydov, V. Yu
Golubev, V. G.
description Monodisperse spherical nanoporous silicon ( np -Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material ( a -SiO 2 ) is removed by wet etching. The particles obtained have a small root-mean-square size scatter (no more than 10%) and large specific surface area (250 m 2 g –1 ) and pore volume (0.5 cm 3 g –1 ). It is shown that np -Si particles exhibit photoluminescence in the visible and near-IR (infrared) spectral ranges.
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subjects CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
ETCHING
Low-Dimensional Systems
Magnetic Materials
Magnetism
N-TYPE CONDUCTORS
NANOSTRUCTURES
Near infrared radiation
P-TYPE CONDUCTORS
PHOTOLUMINESCENCE
Physics
Physics and Astronomy
PYROLYSIS
Quantum Phenomena
Semiconductor Structures
Silane
SILICON
Silicon dioxide
SILICON OXIDES
SPECIFIC SURFACE AREA
SPHERICAL CONFIGURATION
SYNTHESIS
Thermal decomposition
title Template Synthesis of Monodisperse Submicrometer Spherical Nanoporous Silicon Particles
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